Plasmatherm LAPECVD PM 3 Plasma Enhanced Chemical Vapor Deposition System

Asset # : 60981
Equipment Make: Plasmatherm
Equipment Model: LAPECVD PM 3
Type: Plasma Enhanced Chemical Vapor Deposition System
Wafer Size:
Equipment Configuration:

– 208V
– 50/60Hz
– 3 Phase
– 63 Amps

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Ad Details

  • Added: August 24, 2021

  • Views: 11

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