Jeol JBX 9500 FS Electron Beam Lithography System

Asset # : 60970
Equipment Make: Jeol
Equipment Model: JBX 9500 FS
Type: Electron Beam Lithography System
Wafer Size: 4", 6", 8"
Equipment Configuration:

– 100kV, 100MHz scan speed
– Automated and remote control OL aperture
– Dynamic Focus/Dynamic Stigmation Correction
– 4 Chip Alignment software
– Variable minimum increment writing software
– Field shift writing software
– Water recirculator and mechanical pumps
– M1100-A-UPS Mitsubishi Diamond Plus UPS System
– 2D Mark Detection,Genisys Layout Beamer software package

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Ad Details

  • Added: August 23, 2021

  • Views: 10

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