Jeol JBX 9500 FS Electron Beam Lithography System
Asset # :
60970
Equipment Make:
Jeol
Equipment Model:
JBX 9500 FS
Type:
E-Beam Lithography
Wafer Size:
4", 6", 8"
Equipment Configuration:
– 100kV, 100MHz scan speed
– Automated and remote control OL aperture
– Dynamic Focus/Dynamic Stigmation Correction
– 4 Chip Alignment software
– Variable minimum increment writing software
– Field shift writing software
– Water recirculator and mechanica
Equipment Pictures:
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Added: August 23, 2021
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Views: 171