Applied Materials VeritySEM 2 CD SEM

Asset # : 60782
Equipment Make: Applied Materials
Equipment Model: VeritySEM 2
Type: CD SEM
Wafer Size: 8"
Equipment Configuration:

– Stage performance resolution = 1nm (xy) / 4nm (z) with 2µm accuracy
– Image resolution = 1.8nm @ 500eV
– Side wall imaging = 12 deg tilt at 4 directions
– HAR imaging = 1:30 features
– Accelerating voltage = 0.2kV to 2.5kV
– Extraction V up to 4KV, Probe current = 5pA – 500pA
– 4 wafer cassette loading ports

Equipment Pictures:

Send BTG Message:

Inquire

Ad Details

  • Added: July 21, 2021

  • Views: 16

Description

Tags :