Applied Materials HP Centura PVD Cluster Tool

Asset # : 60366
Equipment Make: Applied Materials
Equipment Model: HP Centura
Type: PVD Cluster Tool
Wafer Size:
Equipment Configuration:

– 50/60Hz, 144kW
Includes:
– 2ea process chamber + cooling & clean
– Control cabinet w/ Leybold Harris & CTI controllers
– AMAT shield treatment controller
– KSI shield treatment supply
– Advanced Energy MDX-L6 RF supply
– Advanced Energy MDX-L12M RF supply
– RFPP LF10A RF supply
– Comdel CPS1001S RF supply
– Power control cabinet, 208V,
– BOC Edwards QDP40 vacuum pump
– BOC Edwards QDP40 vacuum pump w/ QMB250 booster
– CTI-Cryogenics 9600 compressor
– Neslab recirculating chiller

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  • Added: June 10, 2021

  • Views: 19

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