Commonwealth Scientific–Sputter System

Asset # : 60041
Equipment Make: Commonwealth Scientific
Equipment Model:
Type: Sputter System
Wafer Size:
Equipment Configuration:

– With Roughing Pump (Leybold Trivac D40B) & Cryogenic Pump (Oxford Cryoplex 8)
– Chamber interior: 18 x 18 x 24″
– Substrate holder: 8″ diameter
– Water cooled
– Ion Beam Source Type and Size: Commonwealth Scientific 6” RF (Primary), Commonwealth Scientific 4” RF (Secondary)

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  • Added: May 6, 2021

  • Views: 12

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