KLA Tencor Surfscan 6200 Wafer Surface Analysis System

Asset # : 59934

Equipment Make: KLA-Tencor

Equipment Model: Surfscan 6200

Type: Wafer Surface Analysis System

Wafer Size:

Equipment Configuration:

– Bare Wafer Surface Defect Inspection System
– Wafer Capable: 4“ – 8”
– QTY (1) Cassette Plate for 4”, 5“, 6” Wafers Included
– Defect Sensitivity: 0.155um
– Defect Map and Histogram with Zoom
– Haze Map and Histogram with Zoom
– Argon Ion Laser (488nm)

Equipment Pictures: