Axcelis HE 3 High Energy Implanter
Asset # :
58051
Equipment Make:
Axcelis
Equipment Model:
HE 3
Type:
High Energy Implanter
Wafer Size:
12"
Equipment Configuration:
– 5 degree end station
– Software: 4.7.1
– CIM: SECS GEM
– Factory Interface: FOUP x 4
– Standard handler
– Cryos and compressor pairs (x 6)
– Power Distribution Box
Equipment Pictures:
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Added: December 21, 2020
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Views: 475