Axcelis HE 3 High Energy Implanter

Asset # : 58051
Equipment Make: Axcelis
Equipment Model: HE 3
Type: High Energy Implanter
Wafer Size: 12"
Equipment Configuration:

– 5 degree end station
– Software: 4.7.1
– CIM: SECS GEM
– Factory Interface: FOUP x 4
– Standard handler
– Cryos and compressor pairs (x 6)
– Power Distribution Box

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  • Added: December 21, 2020

  • Views: 251

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