Axcelis Optima OHDxT Ion Implanter
Asset # :
57968
Equipment Make:
Axcelis
Equipment Model:
Optima OHDxT
Type:
Ion Implanter
Wafer Size:
12"
Equipment Configuration:
– Load ports: 4
– Missing parts: robot pick on EFEM robot, loadport
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Added: December 8, 2020
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Views: 461