Varian VIISion 80 + HS 31 ION Implantation System Sold

Asset # : 57523
Equipment Make: Varian
Equipment Model: Viision 80 + HS 31
Type: Ion Implant System
Wafer Size: 8"
Equipment Configuration:

– Cassette to Cassette
– Varian Membran Pump
– Source Trubo: Pfeiffer
– Beamline Turbo: Pfeiffer
– Endstation Manifold Turbo Pump: Pfeiffer
– Endstation Differential Pump: Varian Membran Pump
– Cryo Compressor (x2): CTI 9600
– Cryo Prump (x4): CTI 250 F

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  • Added: October 20, 2020

  • Views: 954

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