Leica VB 6 HR E Beam Lithography Sold

Asset # : 57327
Equipment Make: Leica
Equipment Model: VB 6-HR
Type: E-Beam Lithography
Wafer Size:
Equipment Configuration:

– Dose modulation was working with hiccups; this seemed solved before shutdown;
– The SEM image used by the operator to locate the markers for alignment and perform tool tuning shows signal loss from time to time;
this can be solved by manually changing the video settings with the control software;
– Boards in the analog electronics cabinet show blinking red LEDs. The tool was working even in this condition, so the problem is still open;
– Airlock gets stuck from time to time while moving from one position to the other;
– Leakage in a compressed air line: easily solvable when the tool is switched off

Equipment Pictures:

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  • Added: October 9, 2020

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