Leica VB 6 HR E Beam Lithography Sold
Asset # :
57327
Equipment Make:
Leica
Equipment Model:
VB 6 HR
Type:
E-Beam Lithography
Wafer Size:
Equipment Configuration:
– Dose modulation was working with hiccups; this seemed solved before shutdown;
– The SEM image used by the operator to locate the markers for alignment and perform tool tuning shows signal loss from time to time;
this can be solved by manually changing t
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Added: October 9, 2020
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Views: 484