Ulvac Ei 5 K Batch Type High Vacuum Evaporation System for ITO Sold

Asset # : 57224
Equipment Make: Ulvac
Equipment Model: Ei 5 K
Type: Batch Type High Vacuum Evaporation System for ITO
Wafer Size: 4"
Equipment Configuration:

Equipment ran 4″ Sapphire wafers
2″ – 6″ Capable
Main system: (Including Power supply)
Used amount or use pressure: 3Ø200V±10% 50kVA
Connection: M8 terminal
Type: Cooling Water
Main system: Main system
Used amount or use pressure: 0.2~0.3MPa 8(L/min) or more
Connection: In:3/4Rc Out:3/4Rc
Condition: 20~28℃
Type: Cooling Water
Main system: Cryo compressor
Used amount or use pressure: 0.2~0.3Mpa 7(L/min) or more
Connection: In:3/8Rc Out:3/8Rc
Condition: 20~28℃
Type: Cooling Water
Main system: EB gun
Used amount or use pressure: 0.35~0.7MPa 12(L/min) or more
Connection: In:1/2Rc Out:1/2Rc
Condition: 20~25℃
Type: DRY PUMP (LR 90)
Used amount or use pressure: 0.2~0.3MPa 5L/min or more
Connection: In:3/8Rc Out:3/8Rc .
Condition: 20~28℃
*Water back pressure : Less than 0.05MPa

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  • Added: October 9, 2020

  • Views: 350

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