GEA 5 KCF 141 A R2R Auto Alignment Single Side Exposure System

Asset # : 57194
Equipment Make:
Equipment Model: GEA-5 KCF-141 A
Type: R2R Auto Alignment Single Side Exposure System
Wafer Size:
Equipment Configuration:

– Working material(RFID): Thickness :20μm ~200μm
– Top side pasted sensitizer dry film
– Width : 500~550mm
– Working material roll: Core diameter 3″, Outer diameter Max.400mm
– Both edge 5mmis dummy area
Un-winder & cleaning:
– Un-winder distensible reel 3″
– Ionizer blower : after stick roller
– EPC(Edge Position Control)
– Material connection table
– Speed: Range 0.5-10m/min
– Sticky roller device
– Unwinder tension: With digital meter display %
Equipment ability:
– Speed: 2 panel/min (Included exposure time)
– Line/Space: 50μm /50μm (Vacuum mode)
– Exposure gap (Grey area): ±0.1mm
– Position alignment: ±0.1mm
Exposure:
– One collimated lamp from top side and single side exposure.
– Able to select the exposure mode by time or UV energy value.
– UV energy detector for main wavelength 365 nm
– By vacuum exposure.
– UV Intensity : >25mw/cm2
Exposure lamp:
– Lamp type: 5KW arc collimated lamp
– Effective exposure area: Max 500mm x 600mm
– Uniformity : > 90%
– Reflector by optic mirror
– Collimation Half Angle:1.5°
– Declination Angle:1.5°
– Turn-on the lamp by electrical power supply system.
Exposure table
– Top side exposure
– Top table: By glass with auto alignment structure.
– Down table: By vacuum system
– Vacuum level can be adjustable.
Alignment:
– CCD Lens: By coaxial lens CCD x 4 sets,
– With Monitor
– Alignment accuracy: +-10um (Center)
Exposure booth:
– Cleanness: Inside booth with HEPA Filter
– Static-electricity remover: With ionizer blower.
– Temperature: With chiller cooling to keep temperature < 25℃ Winder: - Pulling material: The distance can be setting, accuracy ±0.5mm - Winder distensible reel 3" - Ionizer blower: Before winder. - EPC(Edge Position Control) - Speed: Range 0.5-10m/min - Winder tension: With digital meter display %

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  • Added: October 9, 2020

  • Views: 75

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