Tel ACT – M Developer

Asset # : 57091
Equipment Make: Tel
Equipment Model: ACT - M
Type: Developer
Wafer Size:
Equipment Configuration:

– SMIF Load
– (2) DEV Develop Process Stations
– CWH Cup Washer Holder
– (2) TRS Trasfer Stations
– (2) SMIF I/O
– Bowl 1: (2) NDL Nozzle, FIRM Surfactant, H2O Rinse
– Bowl 2: GP nozzle, H2O Rinse, No bake/cool plates

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Ad Details

  • Added: October 9, 2020

  • Views: 271

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