Tel ACT – M Developer
Asset # :
57091
Equipment Make:
Tel
Equipment Model:
Act M
Type:
Developer
Wafer Size:
Equipment Configuration:
– SMIF Load
– (2) DEV Develop Process Stations
– CWH Cup Washer Holder
– (2) TRS Trasfer Stations
– (2) SMIF I/O
– Bowl 1: (2) NDL Nozzle, FIRM Surfactant, H2O Rinse
– Bowl 2: GP nozzle, H2O Rinse, No bake/cool plates
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Added: October 9, 2020
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Views: 395