Aixtron AIX 2800 G 4 HT GaN MOCVD Sold

Asset # : 56712
Equipment Make: Aixtron
Equipment Model: AIX 2800 G 4 HT
Type: GaN MOCVD
Wafer Size:
Equipment Configuration:

– Susceptor dimension: D520mm x T19mm
– Chamber coil (9 channels)
– Hydride Line: 1xNH3, 2xDopant
– Purifier: H2, N2, NH3
– Pump: DOR pump(SH-110), Ebara pump(ESA70)
With:
– H2 Purifier (IN LINE Type) Teratech TPH-LP-500S(100S) 
– Gas: Hydrogen 
– Process Methods: Line Purifire
– Flow Rate(Nm3/hr): 10.30.50.75.100.150.300
– Impurities Removed : H2 O2 H2O CO CO2

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  • Added: October 9, 2020

  • Views: 140

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