Novellus Sabre NeXT Cobalt Plating System

Asset # : 56671
Equipment Make: Novellus
Equipment Model: Sabre NeXT
Type: Cobalt Plating System
Wafer Size: 12"
Equipment Configuration:

– Load ports: 3
– Handler System: Mylar Template Sabre Anneal 3 FOUP
– Seed Defect Feature
– Waveform Monitor
– Multiwave Option
– EBR Detect- Turnable EBR
– Dosing System w/NowPak
– LT Front & Rear 4 Color
– CMS 7500/7600 Ready Kit
– SBU Ready Kit
– 150 A LPB CB Upgrade

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  • Added: October 9, 2020

  • Views: 126

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