Novellus Sabre NeXT Cobalt Plating System

– Load ports: 3
– Handler System: Mylar Template Sabre Anneal 3 FOUP
– Seed Defect Feature
– Waveform Monitor
– Multiwave Option
– EBR Detect- Turnable EBR
– Dosing System w/NowPak
– LT Front & Rear 4 Color
– CMS 7500/7600 Ready Kit
– SBU Ready Kit
– 150