STS Multiplex Inductively Coupled Plasma (ICP) Sold

– 8.32 KVA
– ICP Process Chamber
– Coil RF Generator and Matching Unit (Platen)
– Phase Shift Controller
– VAT Isolation Valve
– Turbo Pump
– Dry Pump
– Gas Box
– Cluster Multiplex Prime Power Distribution Cabinet Combined with the Process Chamber Electro