Semilab IR 3100 S Micro spot Spectraocopic Ellipsometer

Asset # : 56554
Equipment Make: Semilab
Equipment Model: IR 3100 S
Type: Micro-spot Spectraocopic Ellipsometer
Wafer Size: 12"
Equipment Configuration:

– CIM: SECS, GEM
– Process: Dielectric characterization
– FOUP: Qty. 2
– Handler System: Brooks Robot

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  • Added: October 9, 2020

  • Views: 171

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