Semilab IR 3100 S Micro spot Spectraocopic Ellipsometer
Asset # :
56554
Equipment Make:
Semilab
Equipment Model:
IR 3100 S
Type:
Micro Spot Spectraocopic Ellipsometer
Wafer Size:
12"
Equipment Configuration:
– CIM: SECS, GEM
– Process: Dielectric characterization
– FOUP: Qty. 2
– Handler System: Brooks Robot
Equipment Pictures:
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Added: October 9, 2020
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Views: 301