Raith 150 E Beam Lithography and Metrology Tool
Asset # :
56077
Equipment Make:
Raith
Equipment Model:
150
Type:
E-Beam Lithography and Metrology Tool
Wafer Size:
Equipment Configuration:
– New laser resonator (2013)
– Column completely replaced and upgraded to R150B module with increased write speeds to match Raith 150 TWO model
– Includes flexible substrate size sample holder
– Needs a new tip
Equipment Pictures:
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Added: October 9, 2020
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Views: 265