Ultratech / Veeco LSA 201 Stepper / Spike Anneal Sold

Asset # : 56053

Equipment Make: Ultratech / Veeco

Equipment Model: LSA 201

Type: Stepper / Spike Anneal

Wafer Size: 12"

Equipment Configuration:

– Software version: 5.9 Built 14 Beta
– CIM: SECS/GEM
– Process: Dual Beam
– Main System: Rasco
– Factory Interface: FOUP (2)
– Handler System: Genmark GB
– Options System: DC 035-UT-A Laser
– Others: Remote/Optics Rack
– ATS Heat Exchanger

Equipment Pictures: