Ultratech / Veeco LSA 201 Stepper / Spike Anneal Sold

Asset # : 56053
Equipment Make: Ultratech / Veeco
Equipment Model: LSA 201
Type: Stepper / Spike Anneal
Wafer Size: 12"
Equipment Configuration:

– Software version: 5.9 Built 14 Beta
– CIM: SECS/GEM
– Process: Dual Beam
– Main System: Rasco
– Factory Interface: FOUP (2)
– Handler System: Genmark GB
– Options System: DC 035-UT-A Laser
– Others: Remote/Optics Rack
– ATS Heat Exchanger

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  • Added: October 9, 2020

  • Views: 1045

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