ASM Epsilon 3200 RP left Hand Deposition system Sold

Asset # : 56052
Equipment Make: ASM
Equipment Model: Epsilon 3200 RP left Hand
Type: Deposition system
Wafer Size: 12"
Equipment Configuration:

GAS PANEL NOTES :- All gas module components ( MFCs etc. ) are installed.
– The only change is : GeH4 MFC size is 200 sccm
– Without Quartz Chamber
– EPI104 was used only for SiGe-Process.
– No dopant gases were hooked up
– Software version: V 7.63
– CIM: SECS/GEM
– Process: Epitaxie
– Handler system: Asyst F1
– Handler system: Genmark Transfer
– Options System: OS 9
– Others: Gasmodule
– Factory Interface: FOUP

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  • Added: October 9, 2020

  • Views: 155

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