ASM Epsilon 3200 RP left Hand Deposition system Sold

GAS PANEL NOTES :- All gas module components ( MFCs etc. ) are installed.
– The only change is : GeH4 MFC size is 200 sccm
– Without Quartz Chamber
– EPI104 was used only for SiGe-Process.
– No dopant gases were hooked up
– Software version: V 7.63