Applied Materials Centura TPCC RTP XE+–Sold
Asset # :
56038
Equipment Make:
Applied Materials
Equipment Model:
Centura TPCC RTP XE+
Type:
Wafer Size:
Equipment Configuration:
– Software version: B6.50
– CIM: Linked
– SMIF: Asyst LPT 2200 (qty. 2)
– Handler: HP robot with single contact quartz blade
– Process Chms: XE+ process chamber (Chm A, B & C)
– Loadlock Pump (AA20)
– SMC Chiller (IRN-498)
– Wafer Mapping Mode: FWM
– Robo
Equipment Pictures:
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Added: October 9, 2020
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Views: 822