Alcatel AMS 200 SE Etcher Sold

Asset # : 56033
Equipment Make: Alcatel
Equipment Model: AMS 200 SE
Type: Etcher
Wafer Size: 6"
Equipment Configuration:

– Process: Deep Etcher
– Check Type: ESC
– Exhaust Heater
– EPD
– Turbo Pump: Alcatel AHT1600M
– Missing EPD Camera
Gas Model UFC-8101
– SF6 / Max Flow: 1000sccm
– C4F8 / Max Flow: 400sccm
– O2 / Max Flow: 200sccm
– Ar / Max Flow: 1000sccm

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  • Added: October 9, 2020

  • Views: 325

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