Alcatel AMS 200 SE Etcher Sold
Asset # :
56033
Equipment Make:
Alcatel
Equipment Model:
AMS 200 SE
Type:
Etcher
Wafer Size:
6"
Equipment Configuration:
– Process: Deep Etcher
– Check Type: ESC
– Exhaust Heater
– EPD
– Turbo Pump: Alcatel AHT1600M
– Missing EPD Camera
Gas Model UFC-8101
– SF6 / Max Flow: 1000sccm
– C4F8 / Max Flow: 400sccm
– O2 / Max Flow: 200sccm
– Ar / Max Flow: 1000sccm
Equipment Pictures:
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Added: October 9, 2020
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Views: 645