KLA Tencor Surfscan SP 2 Particle Measurement

Asset # : 55920
Equipment Make: KLA-Tencor
Equipment Model: Surfscan SP 2
Type: Particle Measurement
Wafer Size: 12"
Equipment Configuration:

– No HDD
– 3 FOUP Loaders
– Puck handling
Equipment Pictures:
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  • Added: October 9, 2020

  • Views: 395

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