Lam Rainbow 4520 Etcher Sold
Asset # :
55518
Equipment Make:
Lam
Equipment Model:
Rainbow 4520
Type:
Etcher
Wafer Size:
6"
Equipment Configuration:
– Etch rate (oxide)
Gases:
– Standard gas box
– Gas 1 AR
– Gas 2 CF4 or SF6
– Gas 3 CHF3
– Gas 4 HE
– Gas 5 02
– UPC HE
– Gas weldment polish
– Bottom gas panel exhaust
Wafer Transfer:
– 6″ open cassette exit and entrance load lock wafer holder
– Hine 38
Equipment Pictures:
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Added: October 9, 2020
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Views: 304