Lam Rainbow 4520 Etcher

Asset # : 55518
Equipment Make: Lam
Equipment Model: Rainbow 4520
Type: Etcher
Wafer Size: 6"
Equipment Configuration:

– Etch rate (oxide)
Gases:
– Standard gas box
– Gas 1 AR
– Gas 2 CF4 or SF6
– Gas 3 CHF3
– Gas 4 HE
– Gas 5 02
– UPC HE
– Gas weldment polish
– Bottom gas panel exhaust
Wafer Transfer:
– 6″ open cassette exit and entrance load lock wafer holder
– Hine 38A receiver / sender indexer
– Belt driven load station
– Standard load station shuttle spatula
AC Power:
– AC input (208V, 3Q 5w, 30A
– Fuses for AC/DC power box
– 2.2kw and 400 Khz RF power supply
Chamber Configuration:
– Envision system with CRT
– Bulkhead system mount
– Single chamber with variable gap electrode
– Automatic match system
– Electrode temperature unit interface
– Endpoint detector: monochromatic
– ESC chuck and module
– Viton O-ring all change
– Standard clean gas box installed
Pressure Control System:
– APC controller
– Throttle valve
– Isolation valve open/close type
Upper and Lower Electrode Temp Control:
– Chiller type (2080 TCU)
– Dual system
Vacuum System (option):
– Main chamber: QDP80+QMB250
Pump or IH600:
– Load lock chamber: QDP80

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Equipment Video:

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  • Added: October 9, 2020

  • Views: 156

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