Canon FPA 5000 ES 4 Stepper Sold
Asset # :
54417
Equipment Make:
Canon
Equipment Model:
FPA 5000 ES 4
Type:
Stepper
Wafer Size:
12"
Equipment Configuration:
– SW version V54.06E.04
– Illumination
– Scan illumination
– Flatness
– Z-Spin
– Wafer type: Notch
– Cymer ELS 7300 KrF Scanner laser, 248 nm
– Right side console
– Surface illumination (Standard): 36000 W/m²
– R Type inline direction
– Reduction ratio: 1
Equipment Pictures:
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Added: October 9, 2020
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Views: 772