KLA Tencor SP 1 TBi Non Pattern Inspection System
Asset # :
50347
Equipment Make:
KLA-Tencor
Equipment Model:
SP 1 TBI
Type:
Non Pattern Inspection System
Wafer Size:
Equipment Configuration:
-Software Version: MX 4.1 Build 6224
-Handler Type: 4 x 200 mm
Wafer size: 200mm and 150mm
– System Optics: DIC, DIC Calibration, GEM/SECS (CommPort), GEM/SECS (HSMS), Haze Analysis, Haze Normalization, Oblique, XY Coordinates
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Added: September 13, 2019
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Views: 664