Asset # : 50347
Equipment Make: KLA-Tencor
Equipment Model: SP 1-TBi
Type: Non Pattern Inspection System
Wafer Size:
Equipment Configuration:

-Software Version: MX 4.1 Build 6224
-Handler Type: 4 x 200 mm
Wafer size: 200mm and 150mm
– System Optics: DIC, DIC Calibration, GEM/SECS (CommPort), GEM/SECS (HSMS), Haze Analysis, Haze Normalization, Oblique, XY Coordinates

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  • Added: September 13, 2019

  • Views: 73

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