Asset # : 48082
Equipment Make: Ultratech
Equipment Model: XLS 200
Type: Stepper
Wafer Size: 6"
Equipment Configuration:

– 4x magnification
– 150 mm round and 675 + 20 um thickness
– Minolta 3160 lens
– 22 x 22 mm field size
– 0.5 um resolution
– 1 um depth of focus (in 1.02 um of resist)
– 6 x 6 x 0.25 inch reticle type
– 208 V / 3 Ph / 60 Hz / 40 A power source
– Mercury lamp
– Temperature humidity controller
– Refurbished stage

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  • Added: June 5, 2019

  • Views: 155

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