Ultratech XLS 200 Stepper Sold

– 4x magnification
– 150 mm round and 675 + 20 um thickness
– Minolta 3160 lens
– 22 x 22 mm field size
– 0.5 um resolution
– 1 um depth of focus (in 1.02 um of resist)
– 6 x 6 x 0.25 inch reticle type
– 208 V / 3 Ph / 60 Hz / 40 A power source
– Mercury