Asset # : 48026
Equipment Make: CHA
Equipment Model: Mark 50
Type: Evaporator
Wafer Size:
Equipment Configuration:

– Windows NT Operating System
– EDDY controller sweep. Sweep program is selected by the PLC through binary interface
– Inficon I/C 5 Deposition Controller
– Digital Ionization Gauge: Granville Phillips 307 controller, Bayard-Alpert type with 2 convectrons
– 5 Pocket, 15 or 25CC Electron Beam Gun
– Lift Off dome: Approx. 28 4″ wafers
– CTI Cryo Pump, Leybold Roughing Pump

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  • Added: June 5, 2019

  • Views: 51

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