CHA Mark 50 Evaporator Sold
Asset # :
48026
Equipment Make:
CHA
Equipment Model:
Mark 50
Type:
Evaporator
Wafer Size:
Equipment Configuration:
– Windows NT Operating System
– EDDY controller sweep. Sweep program is selected by the PLC through binary interface
– Inficon I/C 5 Deposition Controller
– Digital Ionization Gauge: Granville Phillips 307 controller, Bayard-Alpert type with 2 convectrons
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Added: June 5, 2019
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Views: 746