Asset # : 42099
Equipment Make: Lam
Equipment Model: Rainbow 4520
Type: Oxide Etch
Wafer Size:
Equipment Configuration: (2) RF Carts ESC Optical non‐contact Particle reduction Orbital gas panel Download recipe He flow control mode: Recipe modeNo auto clean No grey area operating system No LAM Station EPT No heating of gas lines No heating of exhausts MTBC: 72 RF HoursClamping system Generator: PDW 2200 Match: LoFAT Throttle valveTemperature control Chamber upper / Lower (Not heated) Lower electrode temperature: 0°C Upper electrode temperature: 40°CBallast & crossover Crossover gas number: 1 Crossover gas flow: 300 Ballast gas number: 1 Ballast gas flow: 300Orbital gas panel Gas 1: Ar, 1000 sccm Gas 2: CF4, 200 sccm Gas 3: CHF3, 100 sccm Gas 4: N2, 50 sccm Gas 5: O2, 20 sccm Gas 6: SF6, 20 sccm Gas 7: Ar, 100 sccm Gas 8: CF4, 20 sccmChiller: 2080 Dual channel TCU
Equipment Pictures:

Send BTG Message:

Inquire

Ad Details

  • Added: December 4, 2018

  • Views: 18

Description

Tags :