Lam Rainbow 4520 Oxide Etch
Asset # :
42099
Equipment Make:
Lam
Equipment Model:
Rainbow 4520
Type:
Oxide Etch
Wafer Size:
Equipment Configuration:
(2) RF Carts
ESC
Optical non‐contact
Particle reduction
Orbital gas panel
Download recipe
He flow control mode: Recipe modeNo auto clean
No grey area operating system
No LAM Station EPT
No heating of gas lines
No heating of exhausts
MTBC: 72 RF HoursClamp
Equipment Pictures:
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Added: December 4, 2018
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Views: 324