Nanometrics Lynx Equipment Front End Module (EFEM)
Asset # :
40028
Equipment Make:
Nanometrics
Equipment Model:
Lynx
Type:
Equipment Front End Module (EFEM)
Wafer Size:
12"
Equipment Configuration:
with Kawasaki Robot, TDK Load Port
Equipment Pictures:
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Added: September 18, 2018
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Views: 711