Canon FPA 2500 i 1 Stepper
Asset # :
39287
Equipment Make:
Canon
Equipment Model:
FPA 2500 i 1
Type:
Stepper
Wafer Size:
6"
Equipment Configuration:
– Electrical: 3Ø AC 200V 50/60Hz
– Rated power: 15.3 KVA
– Reticle Size: 5″, Canon STD
– Wafer Feeder: Type-L
– PA Unit: 6″, O.F Type
– Chamber: TBW-CD50W
– Illuminator: FPA-2000 i line
– Console version: V5.5A
– A Scope: i-line, TTL
– Θ/Z-Tilt Unit: Pi
Equipment Pictures:
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Added: August 14, 2018
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Views: 190