Karl Suss PR 800 DUV Track Sold

With:
– 8 HP
– 3 CP
– 4 Transfer CP
– 8 Transfer Stations
– 1 HMDS Prime
– 2 Spin Coat with 3 Chemical Dispense Each
– 2 Develop Module with 2 Chemical Dispense
– 1 OEBR
– 52- Wafer Buffer Station
– Interface
– 4 Ort I/O
– Chem. Cabinet
– Class 1 Enclosu