Asset # : 34624
Equipment Make: Gasonics
Equipment Model: PEP Iridia
Type: Double Chamber System
Wafer Size:
Equipment Configuration:

– 1x Ch set up with Sapphire Kit and capable of fluorine use
– 1x Ch is normal quartz for traditional oxygen chemistries

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  • Added: April 17, 2018

  • Views: 252


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