MRC 903 M Three Target Inline Sputtering System
Asset # :
20129
Equipment Make:
MRC
Equipment Model:
903 M
Type:
Three Target Inline Sputtering System
Wafer Size:
Equipment Configuration:
– MKS 252 Exhaust valve controller
– RGA not included(optional)
– 208 V
– 100.0 A
– 60 Hz
– 3 Phase
Equipment Pictures:
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Added: February 14, 2019
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Views: 871