Karl Suss MA 6 BA 6 Gen 2 Mask Aligner
Asset # :
69529
Equipment Make:
Karl Suss
Equipment Model:
MA 6 / BA 6 Gen 2
Type:
Mask Aligner
Wafer Size:
Equipment Configuration:
- Topside (TSA) Alignment
- Backside (BSA) Alignment
- Suss DVM6 Microscope
- UV400 splitfield Optics (for 365nm and 405nm exposure) CIC 500 Power Supply Capable of Hard, Soft, Vacuum Contact with proper tooling.
- 1500W Lamphouse
- Vibration Isolation
- Backside (BSA) Alignment
- Suss DVM6 Microscope
- UV400 splitfield Optics (for 365nm and 405nm exposure) CIC 500 Power Supply Capable of Hard, Soft, Vacuum Contact with proper tooling.
- 1500W Lamphouse
- Vibration Isolation
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Added: February 13, 2023
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Views: 113