Lam Rainbow 4720 Nitride Etcher Sold
Asset # :
56913
Equipment Make:
Lam
Equipment Model:
Rainbow 4720
Type:
Nitride Etcher
Wafer Size:
8"
Equipment Configuration:
– SMIF System: Asyst 2200 indexer built-In (qty. 2)
– Handle System: Wafer notch alignment with spatula, Harmonic drive with wafer handler (qty. 2)
– Process chambers: Ecthing with gap motor driven
– RF Generator 1250W
– Remote AC box
– CIM: Yes
– Softwa
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Added: October 9, 2020
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Views: 351