Tel Alpha 303 i Vertical Anneal Furnace
Asset # :
53584
Equipment Make:
Tel
Equipment Model:
Alpha 303 i
Type:
Vertical Anneal Furnace
Wafer Size:
12"
Equipment Configuration:
– Tube Material: Quartz
– Boat Material: SIC
– Production wafes: 50
– Process Gas: Ar (F.S:30slm), O2 (F.S:30slm), N2 (F.S:30slm), DCE (F.S:1slm)
– Water generating Type:External Torch
– MFC Maker: STEC
– MFC Model: Z 500 series
– Process Temp: 700~1100 C
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Added: October 9, 2020
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Views: 227