Veeco / Wyko NT 9800 Interferometer
Asset # :
42188
Equipment Make:
Veeco / Wyko
Equipment Model:
NT 9800
Type:
Interferometer
Wafer Size:
Equipment Configuration:
– Software version: Vision 4
– Objectives: 5x, 10x, 20x, 50x
– Known problems:Â The laser is defect, calibration procedure is limited, nevertheless, the tool was running last time it was used in October 2018
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Added: December 4, 2018
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Views: 243