Skip to content
English English Chinese Chinese (Traditional) French French German German Japanese Japanese Korean Korean
Skip to product content
Applied Materials P 5000 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Applied Materials P 5000 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Applied Materials P 5000 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Applied Materials P 5000 PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Applied Materials P 5000 PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Asset #: 9926

Make: Applied Materials

Model: P 5000

Wafer Sizes: 4 inch

Last Confirm Date: July 21, 2016

Inquire
Applied Materials P 5000 PECVD (Plasma-Enhanced Chemical Vapor Deposition), 4"
Chambers:
• Chamber A: 4” CVD Silane oxide deposition process kit
• Chamber B: Empty
• Chamber C: Empty
• Chamber D: Empty
Process gasses:
• Nitride: SiH4 / N2 / NH3
• OxiNitride: SiH4 / N2 / NH3 N2O
• USG: SiH4 / N2O
• PSG: SiH4 / N2O / PH3 in Ar
P 5000 Mark II Silane Oxide system (4”). One common Silane Oxide deposition chamber
• Mainframe containing load lock chamber with cassette to cassette wafer handling, 20 slots VME controller with hard disk and floppy
disk storage, 28-line compatible on-board gas panel, bolt down load lock chamber lid, and load lock purge system.
Software:
• 16-bit microprocessor (Motorola 58010). Fully optoisolated inputs and ouputs. 50/32 analog inputs/outputs. 96/96 digital inputs/outputs
• Process programming: Guided step entry method. Maximum recipe size:100 steps
120 watt Solid state RF generator, process kit, gas distribution plate, MFC controller gas line
Electricity
• 208 VAC, 3 phase, 60 Hz
• 5 Wire WYE, 150A/100A (CVD ETCH)
• Transformers 380 VAC, 3P, 50Hz, 3 wire WYE
Chilled water
• Filtered to 120 @m, regulated to 60 PSI, 17 to 22°C
2000 Vintage

Recommended Products

Equipment Sourcing:

Unmatched Expertise in Global Procurement

See More of Our Equipment

At Bridge Tronic Global, we leverage our extensive network and industry expertise to source high-quality semiconductor manufacturing equipment from trusted suppliers worldwide. Whether you're looking for cutting-edge technology or reliable pre-owned equipment, our sourcing capabilities ensure that you receive the best options tailored to your needs.

We understand that every client's requirements are unique, so we prioritize transparency, thorough vetting, and a deep understanding of the global market to secure the right equipment for your operations. Our team is dedicated to delivering timely, cost-effective solutions without compromising on quality or performance.

Wafer test machine

Refurbishment: Restoring Excellence, Maximizing Value

At Bridge Tronic Global, our refurbishment services breathe new life into used semiconductor manufacturing equipment, ensuring peak performance at a fraction of the cost. Our expert technicians meticulously restore equipment from leading brands like KLA and Hitachi, applying rigorous testing and quality control measures. Whether you need a single piece refurbished or a fleet of equipment overhauled, we deliver reliable, high-performing solutions that extend the lifespan of your assets while optimizing your budget.

Learn More
Cleanroom hallway
Cleanroom image

Ready to elevate your semiconductor manufacturing operations?

Contact Bridge Tronic Global today to explore customized solutions that meet your equipment needs. Whether you’re looking for high-quality refurbished equipment, sourcing expertise, or innovative technology, we’re here to help you stay ahead in this fast-paced industry. Let us be your trusted partner in driving efficiency and growth.

Reach Out Now

Cart

Your cart is currently empty