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Varian E 500 Ion Implanter

Asset #: 8940

Make: Varian

Model: E 500

Wafer Sizes: 8 inch

Last Confirm Date: April 18, 2016

Varian E 500 Ion Implanter, 8"
Software Rev- 12.10.21
Boron Gas Bottle Type- SDS
Arsine Gas Bottle Type- SDS
Phos Gas Bottle Type- SDS
External Argon Input- Yes
Type of Source- Bernus Pigtail
Source HiVac Pump- Seiko 1003c Source Rough Pump- Edwards QDP80 Extraction Potential- 70KV
Ion Gauge Type- Varian CCIG
Acell Voltage Potential- 180KV
External HV Resistor Readback- Yes Mirror- Yes
Analyzer HiVac Pump- Seiko 1003c Scanner HiVac PumpSeiko 1003c Beamline Roughing Pump- None
Analyzer Ion Gauge- Varian CCIG
Scanner Ion Gauge- Varian CCIG
Remote Monitor- Yes / Varian
HiVac Pump- CTI Onboard 10
Load Lock Roughing Pump- QDP80 Differential Roughing Pump- QDP80/QMD500
Load Lock HiVac Pump- Varian 250 Wafer Walk Out Detection- Yes
High Throughput Load Locks- No
E-Chuck Platen- Yes
Flat Cable for Roplat- No
Metals Reduction Kit- Partial
Operator Interface Screen- Flat Panel


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