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Varian EHPI E 220 Implanter
Varian EHPI E 220 Implanter
Varian EHPI E 220 Implanter

Varian EHPI E 220 Implanter

Asset #: 84652

Make: Varian

Model: EHPI E 220

Wafer Sizes: 8 inch

Varian EHPI E 220 Implanter, 8"
- Medium Current
- SMIF Interface: Varian Interface for Brooks SMIFS
- Line Voltage: 3 Phase, 208 V
- Line Frequency: 50 / 60 Hz
- UPS: CVCS
- Chamber A - DPN (Aluminum)
- Gas Box: 4 Sticks, HP and SDS 2 in use
- HE MFC Size: Optional
Loadlock / Cassete:
- Chambers (2)
- Type: Cryopump on board 4 f
- Cassette Stage: 200 mm (8") Standard
- Wafer Mapping: Optical Sensor
Transfer Chamber
Status Light Tower:
- Lamp Colors: Red, Orange, Green
Heat Exchanger / Chiller:
- Chiller: Heat Exchange
- DI Cart: EHPI with B-Pure Filters
Pump Options:
- Pump Provider
- Pump Interface Type
- Cooler Pump
- Transport Chamber Pump
- Loadlock Chamber Pump
- Process Chamber Pump PC 1
- Process Chamber Pump PC 2
- Process Chamber Pump PC 3
Not working
Missing Tplm Board & Platen
2001 Vintage

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