{"product_id":"84652","title":"Varian EHPI E 220 Implanter","description":"Varian EHPI E 220 Implanter, 8\"\u003cbr\u003e- Medium Current\u003cbr\u003e- SMIF Interface: Varian Interface for Brooks SMIFS\u003cbr\u003e- Line Voltage: 3 Phase, 208 V\u003cbr\u003e- Line Frequency: 50 \/ 60 Hz\u003cbr\u003e- UPS: CVCS\u003cbr\u003e- Chamber A - DPN (Aluminum)\u003cbr\u003e- Gas Box: 4 Sticks, HP and SDS 2 in use\u003cbr\u003e- HE MFC Size: Optional\u003cbr\u003e Loadlock \/ Cassete: \u003cbr\u003e- Chambers (2)\u003cbr\u003e- Type: Cryopump on board 4 f\u003cbr\u003e- Cassette Stage: 200 mm (8\") Standard\u003cbr\u003e- Wafer Mapping: Optical Sensor\u003cbr\u003eTransfer Chamber\u003cbr\u003eStatus Light Tower:\u003cbr\u003e- Lamp Colors: Red, Orange, Green\u003cbr\u003eHeat Exchanger \/ Chiller:\u003cbr\u003e- Chiller: Heat Exchange\u003cbr\u003e- DI Cart: EHPI with B-Pure Filters\u003cbr\u003ePump Options:\u003cbr\u003e- Pump Provider\u003cbr\u003e- Pump Interface Type\u003cbr\u003e- Cooler Pump\u003cbr\u003e- Transport Chamber Pump\u003cbr\u003e- Loadlock Chamber Pump\u003cbr\u003e- Process Chamber Pump PC 1\u003cbr\u003e- Process Chamber Pump PC 2\u003cbr\u003e- Process Chamber Pump PC 3\u003cbr\u003eNot working\u003cbr\u003eMissing Tplm Board \u0026amp; Platen\u003cbr\u003e2001 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44820345389246,"sku":"84652","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/3-3_5c5c924c-6d13-47e6-a993-3d9e387b38f0.jpg?v=1739731085","url":"https:\/\/www.bridgetronic.com\/products\/84652","provider":"Bridge Tronic Global","version":"1.0","type":"link"}