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Varian Kestrel II 750 Implanter
Varian Kestrel II 750 Implanter
Varian Kestrel II 750 Implanter
Varian Kestrel II 750 Implanter
Varian Kestrel II 750 Implanter
Varian Kestrel II 750 Implanter
Varian Kestrel II 750 Implanter

Varian Kestrel II 750 Implanter

Asset #: 84243

Make: Varian

Model: Kestrel II 750

Varian Kestrel II 750 Implanter
- Energy Range: 10 - 3750 kV
- 10 Site Disk, 10 Wafer per Batch
- Automatic Handling system
- Fully Automated Gas Box, 4 Gas Modules
-Argon (factory inlet)
- PH3 SDS
- AsH3 SDS
- BF3 SDS
- On Board Argon Option Installed (Semi Automated Filling of Stripper Reservoirs
- Software Version 6.41
Spare Parts:
- Suppression PS
- Arc Sense PS
- Analyser Magnet PS
- Power Supply Interface (PSI) Controller
- Source Vacuum Controller
- Manipulator Controller
- 30 kV Terminal PS
- 60 kV Tube Lens PS
- Accel Driver Assy
- Accel Vacuum Controller
- Stripper Valve Control Module
- He Bias PS
- Quad Double PS - Pos Neg (2)
- Faraday Supression PS
- Robot Arm Assy
- Shuttle Arm Assy (2)
- Elevator & Load Lock Platform (3)
- Scan Encoder
- Spin Motor
- Spin Encoder
- Tilt Actuator Motor
- PDC Controller
- Orient Platform & Motor Assy
- LoadLock Door Assy with Window
- Workstation
- Worksation
- GPI PCB Assy
- SST Amp Card Cage (2)
- Disk Scan Bearing
- Wafer Lifter Assy
- Miscellaneous Parts
2003 Vintage

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