{"product_id":"84194","title":"Axcelis GSD 200 Implanter","description":"Axcelis GSD 200 Implanter, 6\"\u003cbr\u003e- Source Head: Enhanced Source w\/ Tantalum\u003cbr\u003e- Extraction: 90 kV \/ 90 kV\u003cbr\u003e- Source Analyzer: Triple Indexed Mass Analysis Magnet \u0026amp; Power Supply\u003cbr\u003e- RGA Resolver: Port\u003cbr\u003e- RGA Chamber: Port\u003cbr\u003e- HYT: Particle Detection Monitor\u003cbr\u003e- MER\u003cbr\u003e- Charge Control: E-Shwr IV (Fwd Bias) \/ P\/N: 1183280\u003cbr\u003e- Post Accel Elect: P\/N: 1182480\u003cbr\u003e- Flag Faraday: Standard\u003cbr\u003e- SMIF: ASYST ARM 2200\u003cbr\u003e- Affinity Disk Chiller w\/ Remote up to 50 ft\u003cbr\u003e- Compressor: 9600 \u0026amp; 8200\u003cbr\u003e- GeF 4 (High Pressure): Unit MFC\u003cbr\u003e- PH 3:(SDS): Unit MFC\u003cbr\u003e- XE: Unit MFC ( E Shower not use)\u003cbr\u003e- Argon (High Pressure): Unit MFC\u003cbr\u003e- Ebara 40 x 20 (2)\u003cbr\u003e- Seiko Seiki H 2000 C\u003cbr\u003e- CTI OB 8\u003cbr\u003e- CTI OB 10\u003cbr\u003e- Hot Cathode Ion Gauge (2)\u003cbr\u003e- Stabil 370 Ion Gauge\u003cbr\u003eIn Air Wafer Handling:\u003cbr\u003e- Automatic Notch Aligner (dual sensor)\u003cbr\u003e- 150 mm FOUR Cassette table\u003cbr\u003e- Dummy Cassette 25 slot\u003cbr\u003e- Vacuum Cassette\u003cbr\u003e- Loadbuffer #1, #2\u003cbr\u003e- In-air Robot\u003cbr\u003eIn-Vac Wafer Handling:\u003cbr\u003e- In-vac Arm\u003cbr\u003e- Holder\u003cbr\u003e- Unclamp\u003cbr\u003e- Elevator\u003cbr\u003eGryo Drive:\u003cbr\u003e- Two Axis Variable Implant Angle \u003cbr\u003e(+ \/ - degrees in both axes)\u003cbr\u003e- Disk Drive Type: Rotary\u003cbr\u003e- Standard Disk\u003cbr\u003e- Cell Controller: Cell 133\u003cbr\u003e- Dose Controller: Real Time Patented Dose Control\u003cbr\u003eSUN Workstation:\u003cbr\u003e- SUN OS\u003cbr\u003e- SPARC 5 (Pri)\u003cbr\u003e- SPARC 5 (Sec)\u003cbr\u003e- SECS-I \u0026amp; SECS II Protocols\u003cbr\u003e- GM Interface \u0026amp; Ethernet Port\u003cbr\u003e1996 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44826273480894,"sku":"84194","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/13-12_bd90fda1-de65-4296-a1f8-d4bc02706277.jpg?v=1739729679","url":"https:\/\/www.bridgetronic.com\/products\/84194","provider":"Bridge Tronic Global","version":"1.0","type":"link"}