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Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter
Axcelis GSD 200 Implanter

Axcelis GSD 200 Implanter

Asset #: 84194

Make: Axcelis

Model: GSD 200

Wafer Sizes: 6 inch

Last Confirm Date: October 14, 2024

Axcelis GSD 200 Implanter, 6"
- Source Head: Enhanced Source w/ Tantalum
- Extraction: 90 kV / 90 kV
- Source Analyzer: Triple Indexed Mass Analysis Magnet & Power Supply
- RGA Resolver: Port
- RGA Chamber: Port
- HYT: Particle Detection Monitor
- MER
- Charge Control: E-Shwr IV (Fwd Bias) / P/N: 1183280
- Post Accel Elect: P/N: 1182480
- Flag Faraday: Standard
- SMIF: ASYST ARM 2200
- Affinity Disk Chiller w/ Remote up to 50 ft
- Compressor: 9600 & 8200
- GeF 4 (High Pressure): Unit MFC
- PH 3:(SDS): Unit MFC
- XE: Unit MFC ( E Shower not use)
- Argon (High Pressure): Unit MFC
- Ebara 40 x 20 (2)
- Seiko Seiki H 2000 C
- CTI OB 8
- CTI OB 10
- Hot Cathode Ion Gauge (2)
- Stabil 370 Ion Gauge
In Air Wafer Handling:
- Automatic Notch Aligner (dual sensor)
- 150 mm FOUR Cassette table
- Dummy Cassette 25 slot
- Vacuum Cassette
- Loadbuffer #1, #2
- In-air Robot
In-Vac Wafer Handling:
- In-vac Arm
- Holder
- Unclamp
- Elevator
Gryo Drive:
- Two Axis Variable Implant Angle
(+ / - degrees in both axes)
- Disk Drive Type: Rotary
- Standard Disk
- Cell Controller: Cell 133
- Dose Controller: Real Time Patented Dose Control
SUN Workstation:
- SUN OS
- SPARC 5 (Pri)
- SPARC 5 (Sec)
- SECS-I & SECS II Protocols
- GM Interface & Ethernet Port
1996 Vintage

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