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KLA Surfscan 6420 Particle Defect System
KLA Surfscan 6420 Particle Defect System
KLA Surfscan 6420 Particle Defect System
KLA Surfscan 6420 Particle Defect System
KLA Surfscan 6420 Particle Defect System
KLA Surfscan 6420 Particle Defect System
KLA Surfscan 6420 Particle Defect System
KLA Surfscan 6420 Particle Defect System
KLA Surfscan 6420 Particle Defect System
KLA Surfscan 6420 Particle Defect System
KLA Surfscan 6420 Particle Defect System
KLA Surfscan 6420 Particle Defect System
KLA Surfscan 6420 Particle Defect System
KLA Surfscan 6420 Particle Defect System

KLA Surfscan 6420 Particle Defect System

Asset #: 83577

Make: KLA

Model: Surfscan 6420

Wafer Sizes: 4, 5, 6, 8 inch

KLA Surfscan 6420 Particle Defect System, 4" to 8"
- 1 Phase
- 0.12 micron defect sensitivity @ 95% capture
- 0.02 ppm haze sensitivity
- Wavelength 488 nm, 30mw Ar laser, blue laser, spot size 90μ
- Scan frequency 170 Hz; scan pitch: 10, 20 and 40μ
- Throughput 120/6" wph
- Single puck handling from single cassette or platform
- Win 98 software, CD ROM writer, software version: 4.2
- XY coordinates, GEM SECS: options available
1996 Vintage

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