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ASM E 2000 Epitaxial Reactor

Asset #: 83520

Make: ASM

Model: E 2000

Wafer Sizes: 8 inch

Last Confirm Date: September 26, 2024

ASM E 2000 Epitaxial Reactor, 8"
- Supply Voltage / Freq: 480 / 50
- Monitor Type: Flat Panel
- System Hand: Left Hand
- Maint Console: Mini Maint
- CPU: 68040
- Software Version: 7.65
- RP
- Reactor Isolation: HVA
- ATM Valve: VAT
- Vacuum Load Locks
- WHC Gate Valve: VAT
- WHC Robot Arm: Wide
- Pressure Controller: MKS 152 Analogue
- PCV Type: MKS 253B
- Choke Valve
- HCL Hi: 30slm
- HCl Low: 500sccm
- RP Orientation: Bottom Feed
- Gas Panel Orientation: Top Feed
- Main H2/N2: 100 slm
- Cross Purge Valves
- Dep / Vent Transition Valves
- ATM / RP Vent
- Shaft MFC: 5 slm
- P Dopant Loop
- P Loop MFC's Dil/SRC/INJ: 20slm/500/500
- N Dopant Loop: Yes Teed PH3 / AsH3
- N Loop MFC's Dil/SRC/INJ: 20slm/500/500
-175cc and 500cc MFC's are dual range and can be configured for 500sccm
- Aux1: SiH2CI2 500sccm
- TCS: 25gpm LVC
- DCS Cabinet
- TCS Mini Bubbler: 10L LPE
- Gas Detection: Gastec H2 / HCI
- Temperature Controller: Foxboro
- Analog Ratio Control
- 100, 150, 200 mm kits available
2001 Vintage

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