{"product_id":"83517","title":"ASM E 2000 Epitaxial Reactor","description":"ASM E 2000 Epitaxial Reactor, 6\"\u003cbr\u003e- Supply Voltage \/ Freq: 480 \/ 50\u003cbr\u003e- System Hand: Right Hand\u003cbr\u003e- Monitor Type: Flat Panel\u003cbr\u003e- Comms: HSMS\u003cbr\u003e- Maint Console: Mini Maint\u003cbr\u003e- CPU: 68040\u003cbr\u003e- Software Version: 7.65\u003cbr\u003e- Comms: HSMS\u003cbr\u003e- RP\u003cbr\u003e- WHC Gate Valve: Swing\u003cbr\u003e- WHC Robot Arm: Wide\u003cbr\u003e- Reactor Isolation: HVA\u003cbr\u003e- ATM Valve: VAT\u003cbr\u003e- HCL Hi: 20slm\u003cbr\u003e- HCl Low: 2000sccm\u003cbr\u003e- Pressure Controller: MKS 152 Analogue\u003cbr\u003e- PCV Type: MKS 253B\u003cbr\u003e- Choke Valve\u003cbr\u003e- RP Orientation: Bottom Feed\u003cbr\u003e- Gas Panel Orientation: Top Feed\u003cbr\u003e- Main H2\/N2: 100 slm\u003cbr\u003e- Cross Purge Valves\u003cbr\u003e- Dep \/ Vent Transition Valves\u003cbr\u003e- ATM \/ RP Vent\u003cbr\u003e- Shaft MFC: 5 slm\u003cbr\u003e- P Dopant Loop\u003cbr\u003e- P Loop MFC's Dil\/SRC\/INJ: 20slm\/200\/200\u003cbr\u003e- N Dopant Loop: Yes Teed PH3 \/ AsH3\u003cbr\u003e- Aux1: SiH2CI2 500sccm\u003cbr\u003e- TCS: 25gpm LVC\u003cbr\u003e- DCS Cabinet\u003cbr\u003e- TCS Mini Bubbler: 10L LPE\u003cbr\u003e- Gas Detection: Gastec H2 \/ HCI\u003cbr\u003e- Temperature Controller: Foxboro\u003cbr\u003e- Analog Ratio Control\u003cbr\u003e- 100, 150, 200 mm kits available\u003cbr\u003e2001 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44828734914750,"sku":"83517","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/83517","provider":"Bridge Tronic Global","version":"1.0","type":"link"}