Applied Materials Centura Pronto Atmospheric EPI, 6"
Chambers:
- Position A, B, C: (PA) Pronto Atmospheric EPI
- Position D, E: empty
- Position F: (CA) Single Slot Cooldown
Electrical B:
- Line Voltage: 480V with transformer
- Line Frequency: 60 HZ
- Line Amperage: BODA
Chamber A, B, C:
- Upper Dome Temperature CLC: Yes
- SWmonitor Quartz Pyrometer Kit: Yes
- Exhaust Inserts: quartz inserts
- Susceptor: mesh NCP
- Brand: covallent materials
- Lower Liners: vented
- Silicon carbine removable tips
- Exhaust Deposit Reduction: motorized lift
Gas Delivery Options:
- Mixed Dopant 2
- Fast Mixer Stabilization
- Mixed Dopant 2 Ready
- Gas Panel Exhaust (chamber B side)
- MFC: STEC 2500
- Pump Purge
- Regulators and Transducers
- Gas Distribution Type: multiple line drop
Mainframe Loadlock:
- Loadlock Type: wide body
- Wafer Mapping: basic
- Cassette Platform Type: universal
- Cassette Type: Fluoroware PA 182-60MB-06XX
- Front Panel: painted
- Auto Rotation
- WBLL Equalization
- Integrated Cassette Sensor: no
Chamber Options:
- Variable Speed Blower
- Lamps Type: Ushio BNA 6
- Recipe Control Software: serial
- Lift Pin Type: hollow silicon carbide
- Gold Reflective Plating: standard
Other:
- Mainframe Cooling Water: out the back
Transfer Chamber:
- Wafer Sensing: on the fly centerfinding
- Robot: HP+ENP
- Xfer Ch Purge Restrictor Size: 15 SLM
- Clear Blank Off Plates: no
Status Light Tower:
- Panel Mount: RYG
- Light Tower: Rygled
Remotes:
- Computer Type: Vita Controller
- Standard GEM Interface