{"product_id":"82758","title":"Matrix 103 Etcher \/ Asher","description":"Matrix 103 Etcher \/ Asher, 4\" to 6\"\u003cbr\u003ePlasma Power:\u003cbr\u003e-RF 100-500 W Auto-tune\u003cbr\u003e- 600 Watts maximum\u003cbr\u003e- 13.56 MHz\u003cbr\u003eWafer :\u003cbr\u003e- Round\u003cbr\u003e\u0026lt; 4.5\" square substrates\u003cbr\u003eCassette Platform:\u003cbr\u003e- Fixed\u003cbr\u003eClosed Loop Pressure Control:\u003cbr\u003e- Butterfly Valve \u003cbr\u003e- Capacitance Manometer\u003cbr\u003eLatest Software Version \/ Overhead Time\"\u003cbr\u003e- 4.01 \/ 45 sec\u003cbr\u003eTemperature Control of Wafer Chuck:\u003cbr\u003e- Closed Loop\u003cbr\u003e- Resistive\u003cbr\u003e- Element Heated\u003cbr\u003e- Flat Chuck\u003cbr\u003e- Range: 100°C - 220°C (+5°C)\u003cbr\u003ePlasma Chamber \/ Electrode Design:\u003cbr\u003e- Showerhead \/ Multipoint Electrode\u003cbr\u003eNo Baffle \u003cbr\u003eBaseplate  Cooling\u003cbr\u003eNo Wafer Cooling Station\u003cbr\u003eProcess:\u003cbr\u003e- Throughput; \u0026gt;25 WPH\u003cbr\u003e- Process Gases: 02 \u0026amp; N2 Standard (3rd MFC optional)\u003cbr\u003eStrip Rate (6\" wafers, 1.2 μ 120°C baked resist):\u003cbr\u003e\u0026gt;0.8 μ\/min @ 220°C\u003cbr\u003eNon-uniformity, 1 sigma:\u003cbr\u003e- \u0026lt; 15%\u003cbr\u003eParticulates added\/ size:\u003cbr\u003e- \u0026lt;0.10 \/ cm2 \u0026gt; 0.3mm\u003cbr\u003eMin Vacuum Pump speed:\u003cbr\u003e- 26 CFM\u003cbr\u003eReliability:\u003cbr\u003e- Availability: \u0026gt; 85%\u003cbr\u003e- MTBF: \u0026gt; 250 hours\u003cbr\u003e- MTBA: \u0026gt; 24 hours\u003cbr\u003e- MTTR: \u0026lt; 6 hours","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44831946834110,"sku":"82758","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/82758","provider":"Bridge Tronic Global","version":"1.0","type":"link"}